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Features
- Limited-Contact Breakwheel System
- Servo-driven, air-bearing X- and Y-axis Control (with 0.5 micron resolution)
- Automatic 90° Rotation
- 6" (150mm) Wafer Capacity
- High-resolution Digital Camera with electronic focusing
- Proprietary Machine Control Software
- Automatic Channel Alignment
- Automatic Theta Alignment
- Windows® XP
- European-Approved Power Source
- Saw Frame Adapter
- Ring Pair Compatibility
- Modular Construction and Maintenance
- LCD Monitor
- Ethernet Technology
- Password Protected Software Operation Levels
- Operator
- Recipes
- Maintenance
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Specifications
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LSD
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Dimensions (h,w,d)
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(28.0, 39.0, 27.0) in
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(71.1, 99.0, 68.6) cm
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Weight
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147.0 lbs
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68.2 kg
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Computer (specifications may vary)
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Dimensions (h,w,d)
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(16.5, 7.5, 17.0) in
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(41.9, 19.1, 43.2,) cm
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Weight
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30.1 lbs
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13.7 kg
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Monitor (specifications may vary)
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Dimensions (h,w,d)
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(11.5, 13.5, 2.5) in
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(29.2, 34.3, 6.4) cm
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Weight
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5.8 lbs
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2.6 kg
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Electrical Specifications
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Power Requirements
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100-240 V, 50/60 Hz
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Power Consumption
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0.05 hp
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35 W
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Pneumatic Specifications
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Pressure Requirements
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65 psi
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455 kPa
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Vacuum Requirements
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None
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None
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Ratings: Inputs and Outputs
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Operating Temperature Range
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Altitude to 2000m, 5 - 40°C
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Max and Min humidity at temp.
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80% to 31°C, decreasing to 50% at 40°C
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Input voltage variance
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+/- 10% of nominal
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LSD-150 Specifications
