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Features
- Orthogonal Vector Breaker
- Motorized Rotation Control
- 4" (100mm) Wafer Capability
- Color Camera
- Machine Control Software
- Auto Channel Recognition Software
- Windows® XP Computer & Monitor
- CE and SEMI-S2 Certification*
Options
- Back-Side Microscope
- Hi-Resolution Camera
- Vacuum Chuck Wafer Mount
- Square Frame Wafer Mount
- Saw Frame Mount and Adapter
- Emergency Stop Switch
- European-Approved Power Source
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Specifications
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LSD
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Dimensions (h,w,d)
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(20.0, 14.88, 20.25) in
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(50.8, 37.8, 51.4) cm
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Weight
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47.0 lbs
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21.3 kg
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Computer (some models)
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Dimensions (h,w,d)
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(10.25, 7.5, 17.0) in
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(26.0, 19.1, 43.2,) cm
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Weight
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23.0 lbs
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10.5 kg
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Monitor (some models)
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Dimensions (h,w,d)
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(15.5, 14, 15.5) in
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(39.4, 35.6, 39.4) cm
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Weight
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28.0 lbs
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12.7 kg
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Electrical Specifications
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Power Requirements
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100-240 V, 50/60 Hz
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Power Consumption
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0.05 hp
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35 W
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Pneumatic Specifications
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Pressure Requirements
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50 psi
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350 kPa
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Vacuum Requirements
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-20 inHg
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-500 mmHg
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Ratings: Inputs and Outputs
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Operating Temperature Range
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Altitude to 2000m, 5 - 40°C
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Max and Min humidity at temp.
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80% to 31°C, decreasing to 50% at 40°C
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Input voltage variance
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+/- 10% of nominal
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* CE and SEMI-S2 Certification
The CE mark is a mandatory European marking for certain product groups to indicate conformity with the essential health and safety requirements set out in European Directives.
SEMI (Semiconductor Equipment and Materials International), also known as SEMI-S2, is a comprehensive document that addresses a wide range of equipment and ESH criteria. It is not the philosophy of SEMI S2 to provide all of the specific design criteria that may be applied to semiconductor manufacturing equipment but rather to provide criteria unique to the industry and a roadmap to some of the many international codes, regulations, standards, and specifications that must be used when designing semiconductor manufacturing equipment.
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LSD-110 Machine Breaking Process
